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MSE 238: Introduction to Microelectromechanical Systems

An introduction to the design and fabrication of microelectromechanical systems (MEMS). Topics include micromachining processes; material properties; transduction; applications in mechanical, thermal, optical, radiation, and biological sensors and actuators; microfluidic devices; BioMEMS and applications; packaging and reliability concepts; and metrology techniques for MEMS. Cross-listed with ME 270.